Estimation of valence state and growth rate using principal component analysis of plasma emission in reactive sputtering deposition (Science and Technology if Advanced Materials: Methods)
R. Minami, E. Kita, C. Mitsumata and H. Yanagihara,
“Estimation of valence state and growth rate using principal component analysis of plasma emission in reactive sputtering deposition”,
Science and Technology of Advanced Materials: Methods (2025) 2544523. (DOI:10.1080/27660400.2025.2544523)
投稿日：2025年9月8日